Bio-MEMS: Technologies and Applications by Wanjun Wang, Steven A. Soper

By Wanjun Wang, Steven A. Soper

Microelectromechanical structures (MEMS) are evolving into hugely built-in applied sciences for various program parts. upload the organic measurement to the combination and a number of recent difficulties and concerns come up that require a wide figuring out of elements from simple, fabrics, and clinical sciences as well as engineering. accumulating the efforts of well known leaders in each one of those fields, BioMEMS: applied sciences and functions provides the 1st wide-reaching survey of the layout and alertness of MEMS applied sciences to be used in organic and scientific parts. This e-book considers either the original features of organic samples and the demanding situations of microscale engineering. Divided into 3 major sections, it first examines fabrication applied sciences utilizing non-silicon tactics, which use fabrics which are applicable for medical/biological analyses. those comprise UV lithography, LIGA, nanoimprinting, injection molding, and hot-embossing. realization then shifts to microfluidic parts and sensing applied sciences for pattern instruction, supply, and research. the ultimate part outlines numerous functions and structures on the innovative of BioMEMS expertise in numerous components reminiscent of genomics, drug supply, and proteomics. Laying a cross-disciplinary starting place for additional improvement, BioMEMS: applied sciences and functions presents engineers with an knowing of the organic demanding situations and organic scientists with an figuring out of the engineering demanding situations of this burgeoning expertise.

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Lorenz, M. Despont, P. Vettiger, and P. Renaud, Fabrication of photoplastic high-aspect ratio microparts and micromolds using SU-8 UV resist, Microsyst. Technol. 4, 143–146, 1998. [3] K. Lee, N. LaBianca, S. Rishton, and S. Zohlgharnain, Micromachining applications for a high resolution ultrathick photoresist, J. Vac. Scien. Technol. B 13, 3012–3016, 1995. [4] H. Lorenz, M. Despont, N. Fahrni, N. Labianca, P. Vettiger, and P. Renaud, EPON SU-8: A low-cost negative resist for MEMS, in Proc. of Micro Mechanics Europe '96, Barcelona, 32–35, 1996.

Thickness of the resist is another key parameter that dictates the required dosage of the exposure. 12 shows two curves of required exposure dosage and the thickness of SU-8. MicroChem, the vendor of SU-8, advises that the user filter out the light with a wavelength lower than 350 nm to improve lithography quality. 6, the total exposure dosage ratio between the i-line and h-line are kept in a range of 1:7 to approximately 1:10 to achieve perfect vertical sidewalls, especially for the SU-8 resist with thickness around 1 mm.

The micromixer/reactor is based on large arrays of spatially impinged microjets mixing. 16. Two arrays of micronozzles are in opposite directions. The micronozzles are parallel with the substrate plane. There are two possible ways to arrange the opposite arrays of nozzles: directly opposite orientations or with a designed offset. The two sample fluids are delivered to inlet A and inlet B, respectively. Then they are converted into plumes of streams by the large micronozzle array and driven into the mixing chamber.

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